The Tulane Micro/Nanofabrication Facility (MNF) (a.k.a. the Tulane cleanroom) is a leading edge micro/nanofabrication and characterization facility housed in Stanley Thomas Hall and Stern Hall on the Tulane uptown campus in New Orleans. This facility, founded in 2009, houses >$4M in equipment and infrastructure for advanced processing and analysis of materials and devices at the micrometer and nanometer scale. Faculty use this facility to work at the forefront of research in energy generation and storage, quantum materials, polymer science, drug development, biosensing, and more. The facility is also a critical educational resource and supports coursework and research for undergraduate and graduate students. The Tulane MNF is a leading micro/nanofab facility in the Gulf South and is open to users from institutions and companies across the region.
The class 1000 cleanroom space in Stanley Thomas Hall includes the following equipment:
- Suss MJB4 mask aligner and related photolithography tools
- AJA sputtering system
- AJA ion miller
- Bruker D8 Discover X-ray diffraction (XRD) system
- Angstrom Engineering electron-beam evaporator
- Multimode atomic force microscope (AFM)
- Olympus optical microscope with camera and heated stage
- KLA Tencor stylus profilometer
- Zegage optical profilometer
- J.A. Woollam spectroscopic ellipsometer
- Sentrotech vacuum furnace
- Harrick oxygen plasma cleaner
- Heatpulse 610 rapid thermal annealer (RTA)
- Trion inductively coupled plasma reactive ion etcher (ICP-RIE), with DRIE and PECVD capabilities
- Filmetrics F20-UV Spectral Reflectance Tool
- Pelco FlexScribe
- Various chemical fume hoods, laminar flow hoods, and a glove box
The nanofabrication facility in Stern Hall includes the following:
- Nabity NPGS electron beam nanolithography system (on Hitachi 3400 SEM)
- Raith VOYAGER electron beam nanolithography system
For more information, or to gain access, please contact:
Dr. Michael Johnson | Cleanroom Manager
Email: mjohnso6@tulane.edu
Phone: (504) 232-2464
Dr. Matthew Escarra | Cleanroom Faculty Director
Email: escarra@tulane.edu
